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Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes Style:Paperback / softback and the wider eighteenth-century world

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Description

and the wider eighteenth-century world

they found him guilty

Constance L

Publisher: Northern Heritage Services

Publication date: 11 March 2021

Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes Style:Paperback / softback and the wider eighteenth-century worldFormat: Paperback softback Length: 127 pages Publication date: 25 September 2020 Publisher: Springer Nature Switzerland AG This thesis develops next generation multi degree of freedom gyroscopes and inertial measurement units (IMU) using micro electromechanical systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro nano fabrication solutions to key performance limits in MEMS resonator

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